Note: This course is not available for the current semester.
Course No: 16.605; Last Offered: No Data;
Thermodynamics of defect generation, mechanisms of their interaction and movement. The generation of point defects, dislocations, two dimensional defects specifically during every technological step, such as wafering, oxidation, diffusion, epitaxy, etc. Influence of dislocations and point defects on electrical and optical properties of silicon and compound semiconductor devices. Techniques for reduction of defects in device fabrication technology.
Contact the Advising Center at 978-934-2474 or Continuing_Education@uml.edu
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