Note: This course is not available for the current semester.
Course No: EECE.5190; Last Offered: No Data;
Recently fabrication of Very Large Scale Integrated circuits has spun-off a new technology of micro-machines (MEMS) and sensors on a semiconductor wafer. These new devices are ideally located next to a microprocessor on the same wafer or a separate chip. The data transfer to and from a miniature machine, sensor or transducer is processed and controlled on site. Topics include design of mechanical, electrical and biological transducers; properties of electronic materials; pattern generation on a semiconductor wafer; interface of a micromachine and processor; applications and markets for submicron machines.
Contact the Advising Center at 978-934-2474 or Continuing_Education@uml.edu
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