Engineering of Submicron Machines

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Note: This course is not available for the current semester.

Course No: EECE.5190; Last Offered: No Data;

Course Description

Recently fabrication of Very Large Scale Integrated circuits has spun-off a new technology of micro-machines (MEMS) and sensors on a semiconductor wafer. These new devices are ideally located next to a microprocessor on the same wafer or a separate chip. The data transfer to and from a miniature machine, sensor or transducer is processed and controlled on site. Topics include design of mechanical, electrical and biological transducers; properties of electronic materials; pattern generation on a semiconductor wafer; interface of a micromachine and processor; applications and markets for submicron machines.

Prerequisites & Notes

  • Prerequisites:
  • Special Notes:
  • Credits: 3;

Questions About This Course?

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